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Particle coating device Product List

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MSP Corporation Particle Coating Service

Accurately apply particles for inspection device evaluation.

MSP Corporation is a company that provides high-precision particle coating technology for the semiconductor and device fields. Centered around its patented DMA classification technology, it offers particle coating equipment and coating services that can control particle size and the number of coatings with high reproducibility. Regarding particle coating services, a range of service menus is available according to applications, including coating for evaluation and verification wafers, coating for photomasks, PRE coating for cleaning equipment evaluation, and SPx coating wafers for surface inspection equipment calibration. These coatings are performed using NIST-traceable standard particles, and accompanying materials such as scan results and coating reports can also be provided.

  • MSP塗布サービス2.jpg
  • Semiconductor inspection/test equipment
  • Particle coating device

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MSP Corporation Particle Coating Device

Particle size, quantity, and pattern. A coating device that does not compromise.

MSP Corporation is a company that provides high-precision particle coating technology for the semiconductor and device fields. At the core of its offerings is a patented DMA classification technology, which enables the precise control of particle size and coating quantity with high reproducibility through its particle coating equipment and coating services. MSP's particle coating equipment can accurately apply particles ranging from the nanometer to micrometer scale on substrates, including 300mm wafers, and supports various coating patterns such as spot, full area, ring, and edge-arc. In addition to standard particles like PSL and SiO₂, it also accommodates various process particles that simulate actual processes.

  • MSP塗布装置-2.png
  • MSP塗布装置-3.png
  • Semiconductor inspection/test equipment
  • Particle coating device

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