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MSP Corporation Particle Coating Device

Particle size, quantity, and pattern. A coating device that does not compromise.

MSP Corporation is a company that provides high-precision particle coating technology for the semiconductor and device fields. At the core of its offerings is a patented DMA classification technology, which enables the precise control of particle size and coating quantity with high reproducibility through its particle coating equipment and coating services. MSP's particle coating equipment can accurately apply particles ranging from the nanometer to micrometer scale on substrates, including 300mm wafers, and supports various coating patterns such as spot, full area, ring, and edge-arc. In addition to standard particles like PSL and SiO₂, it also accommodates various process particles that simulate actual processes.

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  • Semiconductor inspection/test equipment
  • Particle coating device

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